Arrayed Materials
Shenzhen-based national high-tech enterprise developing thin-film and high-throughput materials preparation systems, including PLD, magnetron sputtering, electron beam evaporation and MBE equipment.
Last updated September 28, 2026
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Overview
Arrayed Materials (Shenzhen Matrix Multi-element Technology Co., Ltd.; Chinese: 深圳市矩阵多元科技有限公司, commonly 矩阵科技) is a Shenzhen-based national high-tech enterprise focused on the development and application of thin-film materials preparation and high-throughput materials preparation systems. The company supplies both research-grade and production-grade thin-film deposition equipment, including pulsed laser deposition (PLD) systems, magnetron sputtering systems, electron beam evaporation systems, and molecular beam epitaxy (MBE) systems. It also offers vacuum interconnect systems that allow coating and testing steps to be completed under vacuum, as well as vacuum components such as heaters, target stages and masks. Beyond hardware, Arrayed Materials provides R&D services using its high-throughput materials platform to develop new materials independently or in collaboration with universities, research institutes and enterprises, and it works on materials big data to predict new materials and shorten the path from concept to commercialization. The company's core team comes from the University of California, Berkeley and global Fortune 500 companies including Applied Materials, Western Digital and Tokyo Electron, as well as multiple national laboratories, with decades of experience in equipment development and materials R&D. Its high-throughput materials preparation platform, based on PLD and magnetron sputtering technologies, can prepare up to 100 different material formulations or process conditions in a single batch and can rapidly and automatically test and screen up to 100 material samples at the same time. Compared with traditional one-by-one trial-and-error approaches, this platform is intended to greatly shorten new materials R&D cycles, reduce R&D costs and accelerate the development and application of new materials. Arrayed Materials has received multiple rounds of investment from well-known institutions including Songhe Capital, SMIC Fund, Lenovo Capital and Incubator Group, and Inovance Technology. It has been recognized as a Shenzhen "Specialized, Refined, Differentiated and Innovative" SME and an "Innovative SME," and in 2021 Deloitte named it one of Shenzhen's "High-Tech High-Growth 20" and "Tomorrow's Star" companies. Its equipment has supported Chinese scientists in achieving major breakthroughs, including the discovery of high-temperature superconductivity in nickel oxides at ambient pressure by a joint research team led by Academician Xue Qikun of Southern University of Science and Technology, and the preparation of high-quality antiferroelectric PbZrO3 epitaxial thin films by Professor Chen Zuhuang's team at Harbin Institute of Technology for a Science paper. In 2024 the company completed a B2 round of financing totaling 100 million yuan to focus on next-generation advanced packaging PVD solutions, and it won first prize in the enterprise group of the Shenzhen Innovation and Entrepreneurship Competition.
History
Arrayed Materials (Shenzhen Matrix Multi-element Technology Co., Ltd.; Chinese: 深圳市矩阵多元科技有限公司, commonly 矩阵科技) is a Shenzhen-based national high-tech enterprise specializing in the development and application of thin-film materials preparation and high-throughput materials preparation systems. The company was founded by Dr. Zhang Xiaojun, a UC Berkeley mechanical engineering Ph.D. who previously served as a senior R&D engineer at Applied Materials and chief R&D engineer at Western Digital. Its core team brings together talent from UC Berkeley and Fortune 500 companies such as Applied Materials, Western Digital and Tokyo Electron, as well as multiple national laboratories, with decades of experience in equipment development and materials R&D. The company's main products include research-grade and production-grade thin-film materials preparation systems: pulsed laser deposition (PLD) systems, magnetron sputtering systems, electron beam evaporation systems and molecular beam epitaxy (MBE) systems. It also offers vacuum interconnect systems that link coating equipment with other vacuum equipment so that coating and testing at different stages can be completed under vacuum, and provides vacuum components such as heaters, target stages and masks. Its high-throughput materials preparation platform, based on PLD and magnetron sputtering technologies, can prepare up to 100 different material formulations or process conditions in a single batch and can rapidly and automatically test and screen up to 100 material samples simultaneously, greatly shortening R&D cycles and reducing costs compared with traditional trial-and-error methods. In addition to equipment sales, Arrayed Materials provides R&D services, developing new materials independently or in collaboration with universities, research institutes and enterprises, and works on materials big data to predict new materials. The company has received multiple rounds of investment from well-known institutions including Songhe Capital, SMIC Fund, Lenovo Capital and Incubator Group, and Inovance Technology. It has been recognized as a Shenzhen "Specialized, Refined, Differentiated and Innovative" SME and an "Innovative SME," and in 2021 Deloitte named it one of Shenzhen's "High-Tech High-Growth 20" and "Tomorrow's Star" companies. Its equipment has supported significant scientific achievements: in December 2023, Professor Chen Zuhuang's team at Harbin Institute of Technology used Arrayed Materials' PLD system to prepare high-quality antiferroelectric PbZrO3 epitaxial thin films for a Science paper; in February 2025, a joint research team led by Academician Xue Qikun of Southern University of Science and Technology, the Greater Bay Area Quantum Science Center and Tsinghua University discovered high-temperature superconductivity in nickel oxides at ambient pressure using Arrayed Materials equipment. In September 2024, the company completed a 100 million yuan B2 financing round jointly invested by CRRC Capital, Smart Interconnection Industry Fund, Qianhai Fund of Funds and Yida Capital, focusing on next-generation advanced packaging PVD solutions. In October 2024, it won first prize in the enterprise group of the Shenzhen Innovation and Entrepreneurship Competition. The company holds more than 80 patents and has been reported by mainstream Chinese media including Economic Daily, Economic Information Daily, Sina Finance, Investment World, Shenzhen Special Zone Daily, Securities Times and Interface News.
Won second prize in the growth enterprise group of the Nanshan District "Entrepreneurship Star" competition.
Received the Shenzhen Municipal Government "Talent Bole Award"; founder Zhang Xiaojun was selected for the Ministry of Science and Technology's 2020 Innovation Talent Promotion Plan.
Named by Deloitte as one of Shenzhen's "High-Tech High-Growth 20" and "Tomorrow's Star" companies.
Won the "Excellent Product Award" at the 23rd China Hi-Tech Fair.
Awarded Shenzhen "Specialized, Refined, Differentiated and Innovative SME" and "Innovative SME" titles.
Professor Chen Zuhuang's team at Harbin Institute of Technology used Arrayed Materials' PLD system to prepare high-quality antiferroelectric PbZrO3 epitaxial thin films for a Science paper.
Completed a 100 million yuan B2 financing round jointly invested by CRRC Capital, Smart Interconnection Industry Fund, Qianhai Fund of Funds and Yida Capital.
Won first prize in the enterprise group of the Shenzhen Innovation and Entrepreneurship Competition.
Arrayed Materials equipment supported a joint research team led by Academician Xue Qikun in discovering high-temperature superconductivity in nickel oxides at ambient pressure.
Products and positioning
National high-tech enterprise providing research-grade and production-grade thin-film deposition equipment and high-throughput materials R&D platforms, targeting semiconductor manufacturing, advanced packaging and advanced scientific research.
Pulsed laser deposition system B series
Cost-effective PLD; modular design, software automated control, safety interlock.
Pulsed laser deposition system M series
High-performance PLD/LMBE; modular design, up to 5-axis sample stage, software automated control, safety interlock.
Pulsed laser deposition system L series
Large-area PLD; maximum 8-inch substrate, laser linear scanning improves film uniformity, software automated control, safety interlock.
Magnetron sputtering system
Ultra-high vacuum, target gun tilt angle adjustable without breaking vacuum, precision 0.1°.
Electron beam evaporation system
Compatible with ultra-high vacuum, fully automatic coating process control, can be interconnected with PLD/magnetron vacuum.
Vacuum interconnect system
Interconnects coating equipment with other vacuum equipment, enabling coating and testing at different stages under vacuum.
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