Entegris
Corporate brand
UnclaimedSupplier of semiconductor materials, contamination-control products, and specialty process systems.
Last updated August 22, 2026
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Overview
Entegris is a United States-based supplier of materials, components, and process-control systems used in semiconductor manufacturing and other advanced-technology industries. The company is headquartered in Billerica, Massachusetts, and operates manufacturing, research, customer-service, and other facilities across North America, Asia, Europe, and the Middle East. Its products are designed to help chip manufacturers control contamination, protect delicate materials, improve process consistency, and increase manufacturing yield. Approximately 80% of Entegris products are used in semiconductor applications. The company’s modern corporate identity dates to 1999, when Fluoroware, a business that had begun operating in 1966, was combined with EMPAK. Entegris became a public company in 2000. It subsequently expanded through a series of acquisitions that broadened its capabilities in filtration, specialty materials, wafer handling, chemical delivery, and process control. The 2005 merger with Mykrolis added filtration and fluid-management technologies. In 2008, the acquisition of Poco Graphite expanded the portfolio into specialized graphite, silicon carbide, and related engineered materials. In 2014, Entegris acquired ATMI in a transaction valued at approximately $1.1 billion, adding critical materials and materials-handling solutions. In 2022, it completed the acquisition of CMC Materials, formerly known as Cabot Microelectronics, substantially expanding its position in chemical-mechanical planarization and other semiconductor process materials. Entegris serves multiple stages of chip production, including photolithography, wet etch and cleaning, chemical-mechanical planarization, thin-film deposition, bulk chemical processing, wafer and reticle handling, shipping, testing, assembly, and packaging. Its portfolio includes filtration products for process gases, liquids, and cleanroom environments; systems and components for dispensing, controlling, and transporting process fluids; high-performance materials; specialty gas-management equipment; wafer carriers and shippers; and specialized graphite, silicon carbide, and coating technologies. The company’s strategic role is that of an enabling supplier rather than a consumer-facing semiconductor manufacturer. Its products generally sit inside customers’ fabrication and packaging workflows, where reliability, purity, particle control, chemical compatibility, and materials performance are critical. Entegris has also invested in regional production capacity, including a project announced in 2020 for a major facility in Taiwan’s Kaohsiung Science Park. The company’s customer base and manufacturing footprint reflect the international structure of the semiconductor industry, with operations and markets spanning the United States, East Asia, Europe, and other technology centers.
History
Entegris’s corporate history combines several businesses that developed technologies for handling, purifying, and protecting materials used in semiconductor production. One of its predecessor businesses, Fluoroware, began operating in 1966 and became associated with wafer-handling and contamination-control products. In 1999, Fluoroware and EMPAK were combined into the entity that adopted the Entegris name. The company entered the public markets in 2000. A major early expansion came in August 2005, when Entegris merged with Mykrolis Corporation. Mykrolis had been spun out of Millipore in 2000 and supplied filtration products and related technologies to semiconductor manufacturers. The combination strengthened Entegris’s position in the control and purification of process fluids and gases, areas that are central to reducing particles and other contaminants during chip fabrication. In August 2008, Entegris acquired Poco Graphite, based in Decatur, Texas. Poco brought specialized graphite, silicon carbide, and coating capabilities. Although these materials served semiconductor customers, they also had applications in electrical-discharge machining, glass manufacturing, biomedical equipment, aerospace, and alternative energy. The transaction broadened Entegris beyond its earlier concentration on wafer handling, filtration, and process-fluid management. Entegris expanded again in 2014 through the acquisition of ATMI, a Danbury, Connecticut-based public company. Completed on April 30, 2014, the transaction was valued at approximately $1.1 billion. ATMI supplied critical materials and materials-handling solutions for semiconductor manufacturing, complementing Entegris’s existing products and increasing its exposure to chemical delivery and advanced process materials. The company continued to invest in regional capacity as semiconductor production became increasingly global. In December 2020, Entegris announced plans to invest approximately $500 million in a state-of-the-art facility in Taiwan’s Kaohsiung Science Park. The project was intended to support customers in a major semiconductor manufacturing region and was expected to take roughly three years to complete. In 2022, Entegris completed its acquisition of CMC Materials for approximately $5.7 billion. CMC Materials, previously known as Cabot Microelectronics, was a significant supplier of chemical-mechanical planarization materials and related products. The acquisition was one of Entegris’s largest strategic transactions and materially increased the breadth of its semiconductor materials portfolio. CMC Materials had approximately 2,200 employees at the time described in the reference material. Today, Entegris operates as an international supplier whose products are integrated into numerous fabrication and packaging steps. Its offerings address photolithography, wet etch and clean, chemical-mechanical planarization, thin-film deposition, bulk chemical processing, wafer and reticle handling and transportation, testing, assembly, and packaging. The company’s business is characterized by highly engineered products, demanding purity and reliability requirements, and close relationships with semiconductor manufacturers and equipment users. Beyond semiconductors, selected materials and components serve other high-technology sectors, but semiconductor manufacturing remains the company’s principal market.
- 2022
CMC Materials acquisition
[1]Entegris acquires CMC Materials for approximately $5.7 billion, expanding its chemical-mechanical planarization and semiconductor-materials operations.
- 2020
Taiwan facility investment announced
[1]Entegris announces an approximately $500 million investment in a new facility at Kaohsiung Science Park.
- 2014
ATMI acquisition
[1]Entegris completes its approximately $1.1 billion acquisition of ATMI.
- 2008
Poco Graphite acquisition
[1]The acquisition expands Entegris into specialized graphite, silicon carbide, and coating technologies.
- 2005
Mykrolis merger
[1]Entegris merges with Mykrolis Corporation, adding semiconductor filtration capabilities.
- 2000
Entegris becomes a public company
[1]The company completes its public-market listing.
- 1999
Entegris is incorporated as a combined entity
[1]Fluoroware and EMPAK are combined into the corporate entity that becomes Entegris.
- 1966
Fluoroware begins operating
[1]Fluoroware, one of the businesses that later formed part of Entegris, begins operations.
Products and positioning
A critical-process supplier focused on purity, contamination control, materials performance, and yield improvement for semiconductor and other high-technology manufacturers.
Semiconductor process control
Filtration and purification products
Entegris supplies filtration products intended to purify process gases and liquids and to help control contamination in manufacturing environments. These products support semiconductor processes in which particles, chemical impurities, and unwanted airborne contaminants can reduce yield or damage devices.
Chemical delivery and fluid management
Liquid systems and components
This group includes systems and components that dispense, control, and transport process fluids. They are used to move chemicals and other process materials through fabrication workflows while maintaining the required purity, flow control, and compatibility with aggressive or sensitive substances.
Semiconductor materials
Specialty chemicals and high-performance materials
Entegris provides specialty chemicals and engineered materials used in semiconductor manufacturing. These materials support processes such as deposition, etching, cleaning, and planarization, where controlled chemical behavior and consistent material performance are essential to device quality.
Wafer and reticle handling
Wafer carriers and shippers
Wafer carriers, reticle-handling products, and shipping containers protect wafers and masks from contamination, impact, and breakage during storage, movement, and transportation. These products support the clean and secure transfer of semiconductor materials between process steps and facilities.
Engineered materials · 2008
Graphite, silicon carbide, and coatings
Specialized graphite, silicon carbide, and coating products are used in semiconductor equipment and other demanding industrial applications. The portfolio originated in part through the Poco Graphite acquisition and serves markets that require thermal stability, durability, purity, or specialized surface performance.
Semiconductor process materials · 2022
Chemical-mechanical planarization materials
Through the CMC Materials acquisition, Entegris expanded its presence in chemical-mechanical planarization, a process used to smooth and level wafer surfaces during integrated-circuit fabrication. These materials help manufacturers achieve the surface control required for multilayer semiconductor structures.
Brand decisions
2022
Acquisition of CMC MaterialsM&ABackground
Entegris sought to strengthen its semiconductor materials portfolio, particularly in chemical-mechanical planarization and related process technologies.
Action taken
The company acquired CMC Materials, formerly known as Cabot Microelectronics.
Aftermath
The deal significantly increased the breadth of Entegris’s semiconductor materials business and added approximately 2,200 employees.
Transaction value. $5.7 billion (2022 transaction)
2020
Investment in Taiwan manufacturing capacityStrategyBackground
Taiwan is a major semiconductor manufacturing center and an important location for serving regional customers.
Action taken
Entegris announced an approximately $500 million investment in a state-of-the-art facility at Kaohsiung Science Park.
Aftermath
The project was intended to increase regional production and customer-support capacity.
Announced investment. $500 million (Announced December 2020)
2014
Acquisition of ATMIM&ABackground
ATMI offered critical materials and materials-handling solutions that complemented Entegris’s existing semiconductor portfolio.
Action taken
Entegris completed the acquisition of ATMI on April 30, 2014.
Aftermath
The transaction expanded Entegris’s materials and chemical-handling activities.
Transaction value. $1.1 billion (2014 transaction)
2008
Acquisition of Poco GraphiteM&ABackground
Entegris pursued adjacent engineered-materials capabilities in addition to its semiconductor handling and filtration businesses.
Action taken
The company acquired Poco Graphite, a producer of specialized graphite and silicon carbide products.
Aftermath
Entegris gained materials technologies serving semiconductor and several other high-technology industries.
2005
Merger with MykrolisM&ABackground
Entegris sought to expand its semiconductor contamination-control and filtration capabilities.
Action taken
The company merged with Mykrolis Corporation, a supplier of semiconductor filtration products.
Aftermath
The transaction broadened Entegris’s portfolio in filtration and process-fluid purification.
Recent events
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