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A Japanese company specializing in electron beam-based dimensional measurement and defect review equipment for semiconductor manufacturing.

Last updated September 2, 2026

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Overview

HOLON is a Japanese company that develops and sells electron beam-based dimensional measurement and defect review equipment for masks and wafers used in semiconductor manufacturing. It was established in 1985 and became a consolidated subsidiary of A&D in 2018, later integrating with A&D in 2022 to become a directly owned company of A&D Holon Holdings.

History

HOLON was established in May 1985 in Shinjuku, Tokyo. It developed and announced its first electron beam micro-dimensional measurement equipment (ESPA-11) in 1986. Over the years, it released successive models and expanded internationally, opening a Korea branch in 2004 and a Taiwan branch in 2023. In 2005, it was listed on JASDAQ. In 2018, it became a consolidated subsidiary of A&D. In 2022, it integrated with A&D and became a directly owned company of A&D Holon Holdings, which is listed on the Prime Market. In 2025, it opened Holon Mega-Fab.

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