JSW Aktina System Co., Ltd.

JSW Aktina System Co., Ltd. is a Japanese manufacturer of laser-based process equipment used in the production of semiconductors and flat panel displays. The company is headquartered in Yokohama, Kanagawa Prefecture, and is a wholly owned subsidiary of Japan Steel Works, Ltd. (JSW), a long-established Japanese industrial machinery group. Its product portfolio centers on laser annealing systems sold under the YIELDSCAN brand, along with laser processing tools such as YIELDEdGE and YIELDvia, which are used for crystallization, activation, silicidation, lift-off, and fine-hole drilling in advanced device fabrication. The company's roots trace back to the flat panel display equipment business of Japan Steel Works, which began producing excimer laser annealing (ELA) systems in 1995. Over the following decades, JSW shipped successive generations of ELA tools and expanded into laser annealing for power semiconductors, image sensors, and flexible displays. In October 2021, JSW IT Service Co., Ltd. succeeded to the flat panel display business of Japan Steel Works and was renamed JSW Aktina System Co., Ltd., establishing the current entity. A Chinese subsidiary, 日製鋼機電商貿（上海）有限公司, was established as a wholly owned local corporation. JSW Aktina System's flagship offerings include the YIELDSCAN series of laser annealing systems for silicidation, activation, micro-laser annealing, and excimer laser annealing, as well as the YIELDEdGE film laser cutting system and YIELDvia laser micro-via drilling system. The company states that its excimer laser annealing equipment is used worldwide in the production of high-definition panels for smartphones and PCs, and that it shipped the world's first 8.6th-generation excimer laser annealing system in 2025. Its products are positioned as key enabling tools for energy-saving and miniaturization in modern power semiconductors and for advanced display manufacturing. The company operates primarily in Japan and China, with sales and service activities conducted through its Chinese subsidiary. Its customer base includes semiconductor and display manufacturers, and it participates in industry conferences such as ICSCRM and Ion Implantation and Annealing Technology (IIT). As a subsidiary of Japan Steel Works, JSW Aktina System benefits from the parent group's engineering heritage and industrial resources while focusing specifically on laser process technology for electronics manufacturing.

The history of JSW Aktina System is closely tied to the industrial machinery and flat panel display equipment business of Japan Steel Works, Ltd. (JSW). Japan Steel Works was established in 1907 as a joint venture among Hokkaido Coal and Shipping Co., the British firm Sir W.G. Armstrong, Whitworth & Co., Ltd., and Vickers Sons and Maxim, Ltd. In 1936, JSW's Yokohama Works was completed and began operations in Dorogame-cho, Kanazawa-ku, Yokohama. The Yokohama Works was relocated to its current location in Fukuura, Kanazawa-ku, in 1983. JSW entered the laser annealing equipment field in 1995, when it began production of excimer laser annealing (ELA) systems and shipped the first unit. Excimer laser annealing is a key process for crystallizing amorphous silicon into polycrystalline silicon on glass substrates, which is essential for manufacturing high-resolution liquid crystal displays and AMOLED panels. In 2006, JSW established JSW IT Service Co., Ltd. as an after-service company for the excimer laser annealing equipment business, and in the same year reached cumulative shipment of 100 ELA systems. In 2011, the company launched G5/G6 excimer laser annealing systems, addressing larger glass substrate sizes. In 2014, JSW Machinery Trading (Shanghai) Co., Ltd., the Chinese corporation of Japan Steel Works, began sales and service activities for excimer laser annealing equipment in China. In 2019, cumulative shipments of excimer laser annealing systems reached 200 units. In October 2021, JSW IT Service Co., Ltd. succeeded to the flat panel display business of Japan Steel Works and was renamed JSW Aktina System Co., Ltd. At the same time, 日製鋼機電商貿（上海）有限公司 was established as a wholly owned Chinese subsidiary. In 2025, the company shipped the world's first 8.6th-generation excimer laser annealing system. Today, JSW Aktina System continues to develop and manufacture laser annealing and laser processing equipment for semiconductor and display applications, including systems for silicidation, activation, micro laser annealing, laser lift-off, film cutting, and micro-via drilling. The company markets its products under the YIELDSCAN, YIELDEdGE, and YIELDvia brands and participates in industry conferences such as ICSCRM and IIT.

• 2025

  Shipped the world's first 8.6th-generation excimer laser annealing system.

• 2021

  In October, JSW IT Service Co., Ltd. succeeded to the flat panel display business of Japan Steel Works and was renamed JSW Aktina System Co., Ltd.; established 日製鋼機電商貿（上海）有限公司 as a wholly owned Chinese subsidiary.

• 2019

  Reached 200 cumulative shipments of excimer laser annealing systems.

• 2014

  JSW Machinery Trading (Shanghai) Co., Ltd. began sales and service activities for excimer laser annealing equipment in China.

• 2011

  Launched G5/G6 excimer laser annealing systems.

• 2006

  Established JSW IT Service Co., Ltd. as an after-service company for the excimer laser annealing equipment business; reached 100 cumulative ELA shipments.

• 1995

  Began production of excimer laser annealing systems and shipped the first unit.

• 1983

  Yokohama Works relocated to its current location in Fukuura, Kanazawa-ku.

• 1936

  Yokohama Works completed and began operations in Dorogame-cho, Kanazawa-ku, Yokohama.

• 1907

  Japan Steel Works, Ltd. established as a joint venture among Hokkaido Coal and Shipping Co., Sir W.G. Armstrong, Whitworth & Co., Ltd., and Vickers Sons and Maxim, Ltd.

Specialist supplier of advanced laser annealing and laser processing equipment for semiconductor and flat panel display manufacturing, leveraging unique high-power gas laser control technology and claiming industry-leading performance and world-first product technologies.

• YIELDSCAN (silicidation laser annealing system)

  A system that silicidizes metal films deposited on SiC wafers, using high-power gas laser control technology to achieve industry-leading uniformity and high-speed scanning. Used in power semiconductor manufacturing.

• YIELDSCAN SLA (activation laser annealing system)

  A system used for heat treatment processes that raise the temperature of only local surface areas in semiconductor device manufacturing, mainly used for activation in high-performance image sensor mass production.

• YIELDSCAN MLA (micro laser annealing system)

  A system that irradiates a substrate with a micro beam controlled by a mask pattern, enabling crystallization, activation, and high-dielectric modification of thin films in micrometer-order regions without heating the base substrate.

• YIELDSCAN ELA (excimer laser annealing system)

  A system that modifies amorphous silicon film deposited on glass substrates into polysilicon, used worldwide in the production of high-definition panels for smartphones and PCs.

• YIELDSCAN LLO (laser lift-off system)

  A system that peels off flexible displays formed on carrier glass by laser irradiation, using short-wavelength ultraviolet laser to prevent damage to devices.

• YIELDEdGE FLC (film laser cutting system)

  A system capable of multiple process treatments such as cutting, peeling, and cleaning of films and sheets, mainly used in flexible display manufacturing.

• YIELDvia ELD (laser micro-via drilling system)

  A system that applies high-precision laser heat treatment to various materials such as resin and glass, enabling localized heat treatment for electronic device manufacturing and various industrial applications.

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