Mattson Technology
Mattson Technology is a U.S.-based semiconductor equipment company supplying dry-strip, rapid-thermal-processing, and etching systems to chip manufacturers worldwide.
Last updated August 31, 2026
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Overview
Mattson Technology Inc. is a semiconductor manufacturing equipment company founded in 1988 by Brad Mattson and headquartered in Fremont, California. Its business is focused on process equipment used in the fabrication of integrated circuits rather than on the design or manufacture of semiconductor devices themselves. The company serves a global customer base that includes semiconductor foundries and manufacturers of memory and logic devices. Mattson's principal technology areas include dry-strip systems, rapid thermal processing equipment, and etch systems. These tools are used at different stages of wafer fabrication to remove or modify material layers and to control thermal processes that affect semiconductor device performance. The company's market is therefore closely tied to capital spending by chipmakers, technology transitions in logic and memory production, and the increasing complexity of advanced manufacturing processes. A notable product development was the paradigmE XP etch system, announced in December 2013. Mattson presented the system as a next-generation etch platform designed to address processing requirements associated with leading-edge, three-dimensional semiconductor structures. The platform had reportedly been qualified in November for advanced DRAM device technologies, connecting the product with the industry's move toward more complex memory architectures and three-dimensional device integration. Ownership of the company changed in 2016. In May of that year, Mattson Technology and Beijing E-Town, also referred to as E-Town Dragon, announced that the previously disclosed acquisition of Mattson had been completed. The transaction placed the company within an ownership structure connected to Beijing's municipal investment interests; public descriptions characterize Mattson as partly state-owned through the municipal government of Beijing. Mattson has continued to operate as a semiconductor equipment supplier under that ownership rather than as an independent publicly traded company. Allen Lu has served as Mattson Technology's chief executive officer and president since October 2016, according to the cited reference material. The company's public profile in later years has also included intellectual-property litigation. In 2022, Applied Materials sued Mattson, alleging misappropriation of trade secrets. Mattson countersued Applied Materials in November 2023. The litigation places the company within the competitive and legally sensitive environment surrounding semiconductor process technology, where equipment designs, process recipes, and engineering know-how can have substantial commercial value. Mattson's positioning is that of a specialist process-equipment supplier offering tools for critical wafer-fabrication operations. Its customers are industrial semiconductor producers rather than consumers, and its relevance depends on equipment performance, process qualification, yield improvement, and compatibility with successive generations of memory and logic manufacturing. Detailed current information on its product portfolio, facilities, financial performance, and post-2023 litigation status is not established by the supplied reference material.
History
Mattson Technology was founded in 1988 by Brad Mattson in the United States. From its inception, the company operated in the semiconductor capital-equipment industry, developing and supplying tools used in wafer fabrication. Its principal technology domains became dry stripping, rapid thermal processing, and etching, all of which are process steps used by manufacturers of integrated circuits. The company serves semiconductor foundries as well as producers of memory and logic devices. This places Mattson in a business-to-business segment in which equipment suppliers must qualify their systems with individual chip manufacturers and adapt their products to changing device architectures, process nodes, and production requirements. Unlike a consumer-facing electronics brand, Mattson's products are sold as specialized industrial systems integrated into highly controlled semiconductor factories. In 2013, Mattson introduced the paradigmE XP etch system. Announced in December, the platform was described as a next-generation etch solution for processing challenges associated with leading-edge, three-dimensional semiconductor manufacturing. The system had been qualified in November for advanced DRAM technologies, indicating an effort to address the increasingly demanding requirements of memory production and three-dimensional device structures. A significant corporate change occurred in 2016. Mattson Technology and Beijing E-Town, also known as E-Town Dragon, announced in May that the previously announced acquisition of Mattson had been completed. The resulting ownership structure connected the company with Beijing municipal investment interests, and Mattson has been described as partly state-owned by the municipal government of Beijing. The transaction ended the company's earlier status as an independently listed semiconductor-equipment business, based on the supplied material. Allen Lu became chief executive officer and president in October 2016. Publicly available information in the supplied reference does not provide a complete chronology of subsequent management changes, product introductions, revenue, manufacturing sites, or regional subsidiaries. The company became involved in a significant intellectual-property dispute with Applied Materials. Applied Materials sued Mattson Technology in 2022, alleging theft or misappropriation of trade secrets. Mattson responded with a countersuit in November 2023. The available reference does not establish whether the claims were dismissed, settled, tried, or otherwise resolved. The dispute illustrates the strategic importance of proprietary engineering knowledge in semiconductor equipment, where process performance and equipment architecture can influence customer qualification and competitive position. Mattson Technology remains identified with semiconductor process equipment for dry strip, rapid thermal processing, and etching. Its historical development reflects the broader evolution of chip manufacturing toward more demanding memory and logic structures, while its 2016 acquisition shaped its ownership and corporate context.
- 2023
Mattson files countersuit
[1]Mattson Technology countersued Applied Materials in November in connection with the trade-secret litigation.
- 2022
Applied Materials files trade-secret lawsuit
[1]Applied Materials sued Mattson Technology, alleging theft or misappropriation of trade secrets.
- 2016
Beijing E-Town acquisition completed
[1]Mattson Technology and Beijing E-Town announced completion of the acquisition previously disclosed by the parties.
- 2016
Allen Lu becomes CEO and president
[1]Allen Lu began serving as Mattson Technology's chief executive officer and president in October.
- 2013
paradigmE XP etch system announced
[1]Mattson announced the paradigmE XP, a next-generation etch system aimed at advanced three-dimensional semiconductor manufacturing and qualified for advanced DRAM technologies.
- 1988
Mattson Technology is founded
[1]Brad Mattson founded Mattson Technology in the United States as a semiconductor equipment company.
Products and positioning
A specialist global supplier of semiconductor wafer-fabrication equipment, focused on dry stripping, rapid thermal processing, and etching for foundry, memory, and logic-device manufacturers.
Semiconductor wafer-processing equipment
Dry-strip systems
Dry-strip systems remove selected material layers from semiconductor wafers using plasma-based or related dry processing methods. Mattson identifies dry strip as one of its core equipment areas, supplying tools for industrial chip-fabrication processes.
Semiconductor wafer-processing equipment
Rapid thermal processing systems
Rapid thermal processing systems apply tightly controlled heating and cooling cycles during semiconductor fabrication. Mattson's rapid thermal processing products form part of its equipment portfolio for customers manufacturing memory and logic devices.
Semiconductor wafer-processing equipment
Etch systems
Etch systems selectively remove material from semiconductor wafers to create device features and interconnect structures. Mattson has positioned its etch technology for demanding applications, including advanced three-dimensional semiconductor manufacturing.
Etch system · 2013
paradigmE XP
The paradigmE XP was announced as a next-generation etch system intended to address processing challenges in leading-edge, three-dimensional semiconductor manufacturing. The platform was reported as qualified for advanced DRAM device technologies before its public announcement.
Controversies
2023
Mattson countersuit in trade-secret dispute
Mattson Technology countersued Applied Materials in November 2023 in connection with the trade-secret dispute. No resolution is established in the supplied material.
2022
Applied Materials trade-secret lawsuit
Applied Materials sued Mattson Technology in 2022, alleging theft or misappropriation of trade secrets. The supplied reference does not state the final outcome.
Brand decisions
2016
Completion of Beijing E-Town acquisitionM&ABackground
Mattson had previously announced an acquisition involving Beijing E-Town, also known as E-Town Dragon.
Action taken
The parties announced that the acquisition had been completed in May 2016.
Aftermath
Mattson entered an ownership structure associated with Beijing municipal investment interests and was described as partly state-owned by the Beijing municipal government.
2013
Launch of the paradigmE XP etch platformProduct launchBackground
Advanced memory and logic manufacturing was creating demand for etch processes capable of handling increasingly complex and three-dimensional structures.
Action taken
Mattson announced the paradigmE XP as a next-generation etch system and linked it to qualification for advanced DRAM technologies.
Aftermath
The announcement expanded Mattson's stated etch offering for advanced semiconductor manufacturing applications.
Sources1 sources
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