Pan Solution Technologies Co., Ltd.
Japanese manufacturer of semiconductor and solar-cell material inspection equipment and provider of wafer measurement services.
Last updated September 29, 2026
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Overview
Pan Solution Technologies Co., Ltd. is a Japanese company founded in September 2017 and headquartered in Chiyoda-ku, Tokyo. It operates in the semiconductor and solar-cell materials field, manufacturing and selling inspection equipment for semiconductor and solar-cell materials, offering commissioned wafer measurement services, and providing consulting on semiconductor and solar-cell material technologies. The company is led by Representative Director Satoru Matsushima, with Kozo Fujiwara (Professor at Tohoku University's Institute for Materials Research) as Director and Chief Technology Officer, and Yusuke Hoshi (Associate Professor at Tokyo City University) as Technical Advisor. Its product line includes spot-type and inline-type wafer quality inspection systems that measure defect density, dopant concentration, and surface and internal wafer quality, supporting wafer sizes up to 12 inches. The company has participated in events such as SEMICON Japan 2022 and the 10th Innovation Leaders Summit, and was selected for the Small Business Sustainability Subsidy (General Type) in 2022.
History
Pan Solution Technologies Co., Ltd. was established in September 2017 in Japan. The company was founded to address the need for specialized inspection and measurement solutions in the semiconductor and solar-cell materials sectors. It is headquartered in Chiyoda-ku, Tokyo, and operates with a capital of 73 million yen. The leadership includes Representative Director Satoru Matsushima, Director and CTO Kozo Fujiwara (a professor at Tohoku University), and Technical Advisor Yusuke Hoshi (an associate professor at Tokyo City University). The company has developed spot-type and inline-type wafer quality inspection systems capable of measuring defect density and dopant concentration on wafers up to 12 inches. In 2022, it was selected for the Small Business Sustainability Subsidy (General Type) and participated in SEMICON Japan 2022 and the 51st National Conference on Crystal Growth. In 2024, the company announced an office relocation.
Company founded
Selected for the Small Business Sustainability Subsidy (General Type)
Exhibited at SEMICON Japan 2022
Exhibited at the 51st National Conference on Crystal Growth
Participated in the 10th Innovation Leaders Summit
Announced office relocation
Products and positioning
Specialist provider of inspection and measurement solutions for semiconductor and solar-cell materials, targeting wafer quality assurance and yield improvement.
Spot-type wafer quality inspection system
Measures wafer surface and internal quality, defect density, and dopant concentration. Dimensions: W900 x D900 x H700 mm, weight approx. 50 kg, power single-phase AC 90-240 V. Measurement time: 10 seconds or less per point. Probe contact method. Sample size up to 12 inches. Resistivity up to 20.0 Ω·cm. For p/n type single crystals.
Inline-type wafer quality inspection system
For full inspection on mass production lines. Customizable number of wafers measured simultaneously. Made to order. Dimensions: W2000 x D1500 x H1500 mm, weight approx. 500 kg, power single-phase AC 100-230 V. Measurement time: 1 second per wafer. Probe contact method. Sample size up to 12 inches. Resistivity up to 20.0 Ω·cm. For p/n type single crystals.
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