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Piezosystem Jena

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German manufacturer of piezo micro-positioning, nano-positioning and metrology solutions, established in 1991 in Jena.

Last updated September 15, 2026

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Overview

piezosystem jena is a company based in Jena, Germany, established in 1991. It offers piezo micro-positioning, piezo nano-positioning and metrology solutions to the semiconductor, aerospace, microscopy and synchrotron community. Its product range includes piezo objective positioners, tip-tilt stages, multilayer piezo actuator stacks, fiber switches, piezo amplifiers and control software, with applications such as super resolution microscopy, AFM, process control, semiconductor metrology and nano-positioning for synchrotron radiation.

History

piezosystem jena was established in 1991 and is based in Jena, Germany. The company provides piezo micro-positioning, piezo nano-positioning and metrology solutions to the semiconductor, aerospace, microscopy and synchrotron community. It develops piezo flexure stages and piezomechanical systems, and serves applications such as super resolution microscopy, AFM, process control, semiconductor metrology and nano-positioning for synchrotron radiation. The company maintains partners and support in Europe, Asia and North America.

Products and positioning

Customized piezo solutions with deep experience in nano-positioning, comprehensive consultation and worldwide partners.

  • MIPOS 800 objective positioner

    Offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation using a strain-gauge sensor. Resonant frequency is up to 100 Hz. Closed-loop step resolution is 12 nm.

  • PSH 20 & PSH 35 tip-tilt stages

    2-axis tip-tilt stages offer up to 36 mrad closed-loop tilting range with 1 µrad resolution. The stages deliver a resonant frequency of up to 1.4 kHz with a 0.7′ mirror. Perfect for beam steering, laser scanning, scanning microscopy and more.

  • CuX multilayer piezo actuator stacks

    Designed for demanding applications with operation across a wide voltage range thanks to advanced PZT materials with copper inner electrodes and 20% greater strokes compared to the conventional piezo stacks.

  • Fiber switches

    Piezoelectric driven switches designed for fast switching – measured in milliseconds – low loss and high repeatability. Standard switch configurations range from 1-input to 2-outputs, up to 1-input to 9-outputs. Standard fiber diameters range from 62.5 to 600 micrometers. Humidity resistant models available.

  • NV200/D NET piezo amplifier

    Controlled by PiSoWorks 2.1.1 software and supported by a Python library for control via Ethernet and USB interfaces.

  • TRITOR 100 SG three-axis piezo stage

    Used in a dual-probe active alignment architecture with the NV 40/3 CLE controller for fast fiber-to-chip alignment for wafer testing.

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